Lee, JE-Y and Seshia, AA (2011) Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators. Sensors and Actuators, A: Physical, 167. pp. 237-244. ISSN 0924-4247
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:06 |
| Last Modified: | 22 Oct 2012 01:12 |
| DOI: |
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