CUED Publications database

Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators

Lee, JE-Y and Seshia, AA (2011) Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators. Sensors and Actuators, A: Physical, 167. pp. 237-244. ISSN 0924-4247

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:00
Last Modified: 27 Oct 2014 01:05
DOI: