CUED Publications database

Enhanced transduction methods for electrostatically driven MEMS resonators

Lin, ATH and Lee, JEY and Yan, J and Seshia, AA (2009) Enhanced transduction methods for electrostatically driven MEMS resonators. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), 2009-6-21 to 2009-6-24, Denver, USA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div D > Geotechnical and Environmental
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:24
Last Modified: 27 May 2016 22:03
DOI: