CUED Publications database

Dynamic response of water droplet coated silicon MEMS resonators

Lin, ATH and Yan, J and Seshia, AA (2009) Dynamic response of water droplet coated silicon MEMS resonators. In: IEEE International Ultrasonics Symposium, 2009-9-20 to 2009-9-23, Rome, Italy.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:00
Last Modified: 02 May 2016 10:04
DOI: