CUED Publications database

Suppression of parasitic resonance in piezoresistively transduced longitudinal mode silicon MEMS resonators

Yan, J and Lin, ATH and Seshia, AA (2009) Suppression of parasitic resonance in piezoresistively transduced longitudinal mode silicon MEMS resonators. In: IEEE International Ultrasonics Symposium, 2009-9-20 to 2009-9-23, Rome, Italy.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:03
Last Modified: 05 Feb 2015 08:30
DOI: