CUED Publications database

Suppression of parasitic resonance in piezoresistively transduced longitudinal mode silicon MEMS resonators

Yan, J and Lin, ATH and Seshia, AA (2009) Suppression of parasitic resonance in piezoresistively transduced longitudinal mode silicon MEMS resonators. In: IEEE International Ultrasonics Symposium, 2009-9-20 to 2009-9-23, Rome, Italy.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:20
Last Modified: 30 Nov 2014 21:46
DOI: