Ferri, M and Mancarella, F and Roncoglia, A and Ransley, JHT and Yan, J and Seshia, AA (2008) Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique. In: 7th IEEE Conference on Sensors, 26-10-2008 to 29-10-2008, Lecce, Italy pp. 1131-1134..
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event type = conference Related urls = http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4716640 |
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering Div D > Geotechnical and Environmental |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:05 |
| Last Modified: | 18 Mar 2013 01:07 |
| DOI: | 10.1109/ICSENS.2008.4716640 |
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