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Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique

Ferri, M and Mancarella, F and Roncoglia, A and Ransley, JHT and Yan, J and Seshia, AA (2008) Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique. In: 7th IEEE Conference on Sensors, 2008-10-26 to 2008-10-29, Lecce, Italy pp. 1131-1134..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:20
Last Modified: 10 Mar 2014 18:06
DOI: 10.1109/ICSENS.2008.4716640

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