CUED Publications database

Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique

Ferri, M and Mancarella, F and Roncoglia, A and Ransley, JHT and Yan, J and Seshia, AA (2008) Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique. In: 7th IEEE Conference on Sensors, 2008-10-26 to 2008-10-29, Lecce, Italy pp. 1131-1134..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:09
Last Modified: 03 Aug 2015 02:33
DOI: 10.1109/ICSENS.2008.4716640