CUED Publications database

Thin film monitoring with silicon bulk acoustic resonators

Lee, JEY and Bahreyni, B and Seshia, AA (2008) Thin film monitoring with silicon bulk acoustic resonators. In: 7th IEEE Conference on Sensors, 26-10-2008 to 29-10-2008, Lecce, Italy.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = other Related urls = http://www.ieee-sensors2008.org/noe/pagine/liv1.asp?idp=12
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:05
Last Modified: 18 Jun 2012 01:13
DOI:

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