CUED Publications database

Thin film monitoring with silicon bulk acoustic resonators

Lee, JEY and Bahreyni, B and Seshia, AA (2008) Thin film monitoring with silicon bulk acoustic resonators. In: 7th IEEE Conference on Sensors, 2008-10-26 to 2008-10-29, Lecce, Italy.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:24
Last Modified: 01 Jul 2016 03:39
DOI: