CUED Publications database

Enhanced electrical characterization of MEMS resonators using on-chip parasitic feedthrough self-cancellation

Lee, JE-Y and Seshia, AA (2008) Enhanced electrical characterization of MEMS resonators using on-chip parasitic feedthrough self-cancellation. In: 22nd International Conference EUROSENSORS, 2008-9-7 to 2008-9-10, Dresden, Germany.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 17:34
Last Modified: 10 Dec 2016 22:18
DOI: