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Enhanced electrical characterization of MEMS resonators using on-chip parasitic feedthrough self-cancellation

Lee, JEY and Seshia, AA (2008) Enhanced electrical characterization of MEMS resonators using on-chip parasitic feedthrough self-cancellation. In: 22nd International Conference EUROSENSORS, 2008-9-7 to 2008-9-10, Dresden, Germany.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:34
Last Modified: 10 Mar 2014 17:23
DOI:

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