Lee, JEY and Seshia, AA (2008) 5MHz micromechanical silicon bulk mode resonator with quality factor exceeding 2 million. In: 19th Workshop on Micromachining, Micromechanics and Microsystems, 28-9-2008 to 30-9-2008, Aachen, Germany.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = workshop Related urls = http://www.iwe1.rwth-aachen.de/mme2008/index.php?seite=sponsoring |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div C > Materials Engineering |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 17:05 |
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| Last Modified: | 18 Jun 2012 01:13 |
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| DOI: | |
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