CUED Publications database

5MHz micromechanical silicon bulk mode resonator with quality factor exceeding 2 million

Lee, JE-Y and Seshia, AA (2008) 5MHz micromechanical silicon bulk mode resonator with quality factor exceeding 2 million. In: 19th Workshop on Micromachining, Micromechanics and Microsystems, 2008-9-28 to 2008-9-30, Aachen, Germany.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:34
Last Modified: 11 Dec 2016 01:06
DOI: