CUED Publications database

Applications of Yb lasers in microelectronics fabrication

O'Neill, W and Li, K (2008) Applications of Yb lasers in microelectronics fabrication. In: Conference on Photonic Applications, Systems and Technologies, PHAST''08, 2008-5-6 to 2008-5-8, San Jose, USA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:10
Last Modified: 05 Feb 2015 08:13
DOI: