O'Neill, W and Li, K (2008) Applications of Yb lasers in microelectronics fabrication. In: Conference on Photonic Applications, Systems and Technologies, PHAST''08, 6-5-2008 to 8-5-2008, San Jose, USA.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event type = conference Related urls = http://www.phastconference.org/ |
| Subjects: | UNSPECIFIED |
| Divisions: | Div E > Production Processes Div B > Photonics |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:40 |
| Last Modified: | 29 Oct 2012 01:03 |
| DOI: |
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