CUED Publications database

Applications of Yb lasers in microelectronics fabrication

O'Neill, W and Li, K (2008) Applications of Yb lasers in microelectronics fabrication. In: Conference on Photonic Applications, Systems and Technologies, PHAST''08, 2008-5-6 to 2008-5-8, San Jose, USA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Div B > Photonics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:25
Last Modified: 10 Mar 2014 18:10
DOI: