CUED Publications database

High precision machining of Si using a single mode fibre laser

O'Neill, W and Li, K (2008) High precision machining of Si using a single mode fibre laser. In: 3rd Pacific International Conference on Applications of Lasers and Optics, 2008-4-16 to 2008-4-18, Beijing, China.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Div B > Photonics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 17:53
Last Modified: 28 Aug 2016 23:59
DOI: