CUED Publications database

High Q bulk acoustic mode resonator operating at ambient pressure

Lee, JEY and Zhu, Y and Seshia, AA (2007) High Q bulk acoustic mode resonator operating at ambient pressure. In: 18th Workshop on Micromachining, Micromechanics and Microsystems, 2007-9-16 to 2007-9-18, Guimaraes, Portugal.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 14:41
Last Modified: 01 Aug 2015 23:23
DOI: