CUED Publications database

High Q bulk acoustic mode resonator operating at ambient pressure

Lee, JEY and Zhu, Y and Seshia, AA (2007) High Q bulk acoustic mode resonator operating at ambient pressure. In: 18th Workshop on Micromachining, Micromechanics and Microsystems, 16-9-2007 to 18-9-2007, Guimaraes, Portugal.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = workshop
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:04
Last Modified: 18 Jun 2012 01:13
DOI:

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