CUED Publications database

Focused ion beam machining of glassy carbon for applications in laser based nano and micro lithography

Hu, Q and Li, K and O'Neill, W (2007) Focused ion beam machining of glassy carbon for applications in laser based nano and micro lithography. In: NanoFIB 2007: Advances in Focused Ion Beam Microscopy Conference, 2007-6-29 to --, Manchester, UK.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 17:29
Last Modified: 26 Sep 2016 10:07
DOI: