CUED Publications database

MEMS electrometer system-level simulation using a time-domain variable capacitor model

Zhu, Y and Lee, JEY and Seshia, AA (2007) MEMS electrometer system-level simulation using a time-domain variable capacitor model. In: 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2007-6-10 to 2007-6-14, Lyon, France.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:47
Last Modified: 08 Dec 2014 02:19
DOI: