CUED Publications database

MEMS electrometer system-level simulation using a time-domain variable capacitor model

Zhu, Y and Lee, JEY and Seshia, AA (2007) MEMS electrometer system-level simulation using a time-domain variable capacitor model. In: 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2007-6-10 to 2007-6-14, Lyon, France.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:34
Last Modified: 30 Apr 2016 00:01
DOI: