CUED Publications database

Microfabrication technologies

Flewitt, AJ (2006) Microfabrication technologies. In: Smart MEMS and Sensor Systems. Imperial College Press, London, pp. 31-105.

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Item Type: Book Section
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:42
Last Modified: 26 Jul 2015 03:19
DOI: