CUED Publications database

Microfabrication technologies

Flewitt, AJ (2006) Microfabrication technologies. In: Smart MEMS and Sensor Systems. Imperial College Press, London, pp. 31-105. ISBN 1860944930

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Item Type: Book Section
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:02
Last Modified: 13 Feb 2012 01:30
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