CUED Publications database

Microfabrication technologies

Flewitt, AJ (2006) Microfabrication technologies. In: Smart MEMS and Sensor Systems. Imperial College Press, London, pp. 31-105.

Full text not available from this repository.
Item Type: Book Section
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:13
Last Modified: 24 Jul 2016 01:50
DOI: