CUED Publications database

Microfabrication technologies

Flewitt, AJ (2006) Microfabrication technologies. In: Smart MEMS and Sensor Systems. Imperial College Press, London, pp. 31-105.

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Item Type: Book Section
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:41
Last Modified: 05 Feb 2015 02:02
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