CUED Publications database

Microfabrication technologies

Flewitt, AJ (2006) Microfabrication technologies. In: Smart MEMS and Sensor Systems. Imperial College Press, London, pp. 31-105.

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Item Type: Book Section
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 18:29
Last Modified: 27 Jun 2017 23:19