CUED Publications database

A variable capacitor based MEMS electrometer

Lee, JEY and Zhu, Y and Seshia, AA (2006) A variable capacitor based MEMS electrometer. In: 20th European Conference on Sensors, 17-9-2006 to 20-9-2006, Goteborg, Sweden pp. 452-453..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = other
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:02
Last Modified: 18 Jun 2012 01:13
DOI:

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