CUED Publications database

A variable capacitor based MEMS electrometer

Lee, JE-Y and Zhu, Y and Seshia, AA (2006) A variable capacitor based MEMS electrometer. In: 20th European Conference on Sensors, 2006-9-17 to 2006-9-20, Goteborg, Sweden pp. 452-453..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:32
Last Modified: 01 Dec 2016 09:32
DOI: