CUED Publications database

Development of a process map for low-k materials

Sutcliffe, MPF and Liu, F (2006) Development of a process map for low-k materials. In: 16th CMP Users Meeting, Semicon Europa, 2006-4-7 to --, Munich, Germany.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
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Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 14:34
Last Modified: 05 Sep 2015 00:41
DOI: