CUED Publications database

Development of a process map for low-k materials

Sutcliffe, MPF and Liu, F (2006) Development of a process map for low-k materials. In: 16th CMP Users Meeting, Semicon Europa, 2006-4-7 to --, Munich, Germany.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Biomechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:22
Last Modified: 17 Mar 2014 14:33
DOI: