CUED Publications database

Development of a process map for low-k materials

Sutcliffe, MPF and Liu, F (2006) Development of a process map for low-k materials. In: 16th CMP Users Meeting, Semicon Europa, 2006-4-7 to --, Munich, Germany.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:31
Last Modified: 05 Feb 2015 01:52
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