Yan, J and Seshia, AA and Steen, PG and van Beek, JTM (2006) A silicon MEMS bulk mode 'sandwich' resonator. In: 17th European Workshop on Micromachining, Micromechanics and Microsystems (MME 2006), 3-9-2006 to 5-9-2006, Southampton, UK.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event type = workshop Related urls = http://www.mme2006.ecs.soton.ac.uk/ |
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering Div D > Geotechnical and Environmental |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:02 |
| Last Modified: | 18 Mar 2013 01:07 |
| DOI: |
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