CUED Publications database

A silicon MEMS bulk mode 'sandwich' resonator

Yan, J and Seshia, AA and Steen, PG and van Beek, JTM (2006) A silicon MEMS bulk mode 'sandwich' resonator. In: 17th European Workshop on Micromachining, Micromechanics and Microsystems (MME 2006), 2006-9-3 to 2006-9-5, Southampton, UK.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:31
Last Modified: 30 Nov 2015 15:25