Sutcliffe, MPF and Liu, F and Cheng, L (2005) Process map development for chemical mechanical polishing with low-k material. In: 3rd Conference on World Tribology Congress, -9-2005 to --, Washington, DC, UK pp. 411-412..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = conference |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div C > Materials Engineering |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:36 |
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| Last Modified: | 24 Dec 2012 01:02 |
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| DOI: | |
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