CUED Publications database

Process map development for chemical mechanical polishing with low-k material

Sutcliffe, MPF and Liu, F and Cheng, L (2005) Process map development for chemical mechanical polishing with low-k material. In: 3rd Conference on World Tribology Congress, 2005-9- to --, Washington, DC, UK pp. 411-412..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Biomechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:22
Last Modified: 17 Mar 2014 14:33
DOI: