Sutcliffe, MPF and Liu, F and Cheng, L (2005) Process map development for chemical mechanical polishing with low-k material. In: 3rd Conference on World Tribology Congress, -9-2005 to --, Washington, DC, UK pp. 411-412..
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|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Additional Information: ||Event type = conference|
|Divisions: ||Div C > Materials Engineering|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:36|
|Last Modified: ||24 Dec 2012 01:02|
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