CUED Publications database

Process map development for chemical mechanical polishing with low-k material

Sutcliffe, MPF and Liu, F and Cheng, L (2005) Process map development for chemical mechanical polishing with low-k material. In: 3rd Conference on World Tribology Congress, 2005-9- to --, Washington, DC, UK pp. 411-412..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Biomechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:45
Last Modified: 02 May 2016 06:58
DOI: