CUED Publications database

Process map development for chemical mechanical polishing with low-k material

Sutcliffe, MPF and Liu, F and Cheng, L (2005) Process map development for chemical mechanical polishing with low-k material. In: 3rd Conference on World Tribology Congress, 2005-9- to --, Washington, DC, UK pp. 411-412..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:06
Last Modified: 05 Feb 2015 01:25
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