CUED Publications database

Process map development for chemical mechanical polishing with low-k material

Sutcliffe, MPF and Liu, F and Cheng, L (2005) Process map development for chemical mechanical polishing with low-k material. In: 3rd Conference on World Tribology Congress, 2005-9- to --, Washington, DC, UK pp. 411-412..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Biomechanics
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 18:11
Last Modified: 26 Feb 2017 00:02
DOI: