CUED Publications database

Effects of etch holes in microelectromechanical resonators

Yan, J and Seshia, AA (2005) Effects of etch holes in microelectromechanical resonators. In: 8th International Conference on Modeling and Simulation of Microsystems (MSM2005), 2005-5-8 to 2005-5-12, Anaheim, CA, USA pp. 577-580..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 14:13
Last Modified: 02 Sep 2015 22:31
DOI: