CUED Publications database

Effects of etch holes in microelectromechanical resonators

Yan, J and Seshia, AA (2005) Effects of etch holes in microelectromechanical resonators. In: 8th International Conference on Modeling and Simulation of Microsystems (MSM2005), 2005-5-8 to 2005-5-12, Anaheim, CA, USA pp. 577-580..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:20
Last Modified: 19 May 2014 01:13
DOI:

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