CUED Publications database

Effects of etch holes in microelectromechanical resonators

Yan, J and Seshia, AA (2005) Effects of etch holes in microelectromechanical resonators. In: 8th International Conference on Modeling and Simulation of Microsystems (MSM2005), 8-5-2005 to 12-5-2005, Anaheim, CA, USA pp. 577-580..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = conference Related urls = http://www.nsti.org/Nanotech2005/MSM2005/
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 17:00
Last Modified: 18 Mar 2013 01:07
DOI:

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