CUED Publications database

Analysis of high temperature SOI microhotplates

Ali, SZ and Gonzalez, W and Gardner, JW and Udrea, F (2004) Analysis of high temperature SOI microhotplates. In: The 27th International Semiconductor Conference (CAS'04), 2004-10-4 to 2004-10-6, Sinaia, Romania pp. 351-354..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:57
Last Modified: 31 Jul 2015 23:08
DOI: