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Compliant force amplifier mechanisms for surface-mircromachined resonant accelerometers

Pedersen, CBW and Seshia, AA (2004) Compliant force amplifier mechanisms for surface-mircromachined resonant accelerometers. In: 7th International Conference on Modeling and Simulation of Microsystems, MSM' 04, 7-3-2004 to 11-3-2004, Boston, MA, USA pp. 331-334..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = conference Join conference:7th international conference on modeling and simulation of microsystems MSM 2004, 4th international conference on computational nanoscience and technology, ICCN 2004 and 2004 workshop on compact modeling, WCM 2004
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:59
Last Modified: 20 May 2013 01:37
DOI:

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