CUED Publications database

SOI gas sensors with low temperature CVD films

Gardner, JW and Covington, JA and Shaw, JA and Parkin, I and Udrea, F (2003) SOI gas sensors with low temperature CVD films. In: 17th European Conference on Solid-State Tranducers, Eurosensors, 2003-9-21 to 2003-9-24, Guimarães, Portugal.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 14:49
Last Modified: 02 Sep 2015 22:58
DOI: