CUED Publications database

SOI gas sensors with low temperature CVD films

Gardner, JW and Covington, JA and Shaw, JA and Parkin, I and Udrea, F (2003) SOI gas sensors with low temperature CVD films. In: 17th European Conference on Solid-State Tranducers, Eurosensors, 2003-9-21 to 2003-9-24, Guimarães, Portugal.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:48
Last Modified: 05 Feb 2015 07:58
DOI: