I Y, B and A J, F and C, D and J, R and M J, P and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80°C for plastic application. In: Symposium A: Amorphous and Nanocrystalline Silicon-Based Films, 21-4-2003 to 25-4-2003, San Francisco, CA, US A5.2-..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = other |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:59 |
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| Last Modified: | 23 Jan 2012 01:46 |
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| DOI: | |
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