CUED Publications database

Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80°C for plastic application

I Y, B and A J, F and C, D and J, R and M J, P and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80°C for plastic application. In: Symposium A: Amorphous and Nanocrystalline Silicon-Based Films, 2003-4-21 to 2003-4-25, San Francisco, CA, US A5.2-..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:35
Last Modified: 01 Dec 2016 07:36
DOI: