CUED Publications database

Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80°C for plastic application

I Y, B and A J, F and C, D and J, R and M J, P and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80°C for plastic application. In: Symposium A: Amorphous and Nanocrystalline Silicon-Based Films, 2003-4-21 to 2003-4-25, San Francisco, CA, US A5.2-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
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Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:15
Last Modified: 01 Sep 2015 22:09
DOI: