CUED Publications database

Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application

I Y Y, B and A J, F and J, R and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application. In: UNSPECIFIED pp. 533-538..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:21
Last Modified: 01 May 2015 18:53
DOI: