CUED Publications database

Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application

I Y Y, B and A J, F and J, R and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application. In: UNSPECIFIED pp. 533-538..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:35
Last Modified: 29 Sep 2016 09:32
DOI: