I Y Y, B and A J, F and J, R and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application. In: UNSPECIFIED pp. 533-538..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Symposium held in San Francisco, CA, USA in Apr 2003 as part of the 2003 MRS Spring meeting. Edited by Abelson, John R. |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:59 |
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| Last Modified: | 11 Mar 2013 01:59 |
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| DOI: | |
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