I Y Y, B and A J, F and J, R and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application. In: UNSPECIFIED pp. 533-538..
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|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Additional Information: ||Symposium held in San Francisco, CA, USA in Apr 2003 as part of the 2003 MRS Spring meeting. Edited by Abelson, John R.|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:59|
|Last Modified: ||11 Mar 2013 01:59|
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