CUED Publications database

Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application

I Y Y, B and A J, F and J, R and W I, M (2003) Microcrystalline silicon thin film growth by electron cyclotron resonance chemical vapour deposition at 80oC for plastic application. In: UNSPECIFIED pp. 533-538..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:15
Last Modified: 29 Aug 2015 21:51
DOI: