CUED Publications database

Fabrication and simulation of amorphous carbon cantilever structures

Chua, DHC and Milne, WI and Yu, LJ and Sheeja, D and Tay, BK (2003) Fabrication and simulation of amorphous carbon cantilever structures. In: Symposium on Biomicroelectromechanical Systems, 2003-4- to --, San Francisco, CA, USA.

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Date Deposited: 16 Jul 2015 13:15
Last Modified: 27 Aug 2015 22:24
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