CUED Publications database

Fabrication and simulation of amorphous carbon cantilever structures

Chua, DHC and Milne, WI and Yu, LJ and Sheeja, D and Tay, BK (2003) Fabrication and simulation of amorphous carbon cantilever structures. In: Symposium on Biomicroelectromechanical Systems, 2003-4- to --, San Francisco, CA, USA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:15
Last Modified: 31 Aug 2016 02:57
DOI: