CUED Publications database

Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and uc-Si

Dewarrat, R and Robertson, J (2002) Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and uc-Si. In: Amorphous and Heterogeneous Silicon-Based Films, 2002-4-1 to 2002-4-5, San Francisco, CA, USA pp. 15-20..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:31
Last Modified: 05 Feb 2015 00:43
DOI: