CUED Publications database

Design and coupled-effect simulations of CMOS micro gas sensors built on SOI thin membranes

Lu, CC and Udrea, F and Gardner, JW and Setiadi, D and Dogaru, T and Tsai, TH and Covington, JA (2001) Design and coupled-effect simulations of CMOS micro gas sensors built on SOI thin membranes. In: The SPIE International Symposium on the Design, Test, Integration, and Packaging of MEMS/MOEMS, 2001-4- to --, Cannes, France pp. 86-95..

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Date Deposited: 16 Jul 2015 14:49
Last Modified: 26 Jul 2015 00:03
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