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High quality growth of SiO2 at 80oC by electron cyclotron resonance (ECR) for thin film transistors

Rashid, R and Flewitt, AJ and Robertson, J and Milne, WI (2001) High quality growth of SiO2 at 80oC by electron cyclotron resonance (ECR) for thin film transistors. In: Advanced Materials and Devices for Large-Area Electronics Symposium, -4-2001 to --, San Francisco, CA, US pp. 335-340..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = conference
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:57
Last Modified: 13 Feb 2012 01:30
DOI:

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