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Thermodynamic model of the role of Hydrogen dilution in plasma deposition of microcrystalline silicon

Robertson, J (2001) Thermodynamic model of the role of Hydrogen dilution in plasma deposition of microcrystalline silicon. In: Amorphous and Heterogeneous Silicon-Based Films, Symposium A, Materials Research Society Spring Meeting 2001, -4-2001 to --, San Francisco, CA, USA A1.5-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = conference
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:56
Last Modified: 23 Jan 2012 01:46
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