CUED Publications database

Thermodynamic model of the role of Hydrogen dilution in plasma deposition of microcrystalline silicon

Robertson, J (2001) Thermodynamic model of the role of Hydrogen dilution in plasma deposition of microcrystalline silicon. In: Amorphous and Heterogeneous Silicon-Based Films, Symposium A, Materials Research Society Spring Meeting 2001, 2001-4- to --, San Francisco, CA, USA A1.5-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:46
Last Modified: 26 Jul 2015 03:46
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