CUED Publications database

A novel class of smart gas sensors using CMOS micro-heaters embedded in an SOI membrane

Udrea, F and etiadi, D and Gardner, JW and Covington, JA and Lu, CC (2000) A novel class of smart gas sensors using CMOS micro-heaters embedded in an SOI membrane. In: The 14th European Conference on Solid-State Transducers; Eurosensors XIV, 2000-8- to --, Copenhagen, Denmark pp. 391-392..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:46
Last Modified: 10 Mar 2014 16:33
DOI: