CUED Publications database

3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes

Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) 3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes. In: The 3rd International Conference on the Modeling and Simulation of Microsystems (MSM 2000), 2000-3- to --, San Diego, CA, USA pp. 297-300..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:46
Last Modified: 06 Oct 2014 01:23
DOI: