Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) 3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes. In: The 3rd International Conference on the Modeling and Simulation of Microsystems (MSM 2000), 2000-3- to --, San Diego, CA, USA pp. 297-300..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
| Additional Information: | Event type = conference |
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:55 |
| Last Modified: | 16 Nov 2011 19:00 |
| DOI: | |
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