CUED Publications database

Limiting factors to the fabrication of precision deep microstructures

O'Neill, W and Sutcliffe, CJ and Tunna, L and Kearns, A (1999) Limiting factors to the fabrication of precision deep microstructures. In: International Congress on Applications of Lasers and Electro Optics (ICALEO 1999), 1999-11-15 to 1999-11-18, San Diego, USA.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:25
Last Modified: 10 Mar 2014 16:01
DOI:

Actions (login required)

View Item