CUED Publications database

Limiting factors to the fabrication of precision deep microstructures

O'Neill, W and Sutcliffe, CJ and Tunna, L and Kearns, A (1999) Limiting factors to the fabrication of precision deep microstructures. In: International Congress on Applications of Lasers and Electro Optics (ICALEO 1999), 1999-11-15 to 1999-11-18, San Diego, USA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 17:29
Last Modified: 29 Sep 2016 03:13
DOI: