CUED Publications database

Microfabrication of deep microstructures

Tolfree, D and O'Neill, W and Tunna, L and Sutcliffe, CJ (1999) Microfabrication of deep microstructures. In: MICRO/MEMS Symposium '99, 1999-11- to --, Gold Coast, Australia.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:34
Last Modified: 03 Aug 2015 07:15
DOI: