CUED Publications database

Microfabrication of deep microstructures

Tolfree, D and O'Neill, W and Tunna, L and Sutcliffe, CJ (1999) Microfabrication of deep microstructures. In: MICRO/MEMS Symposium '99, 1999-11- to --, Gold Coast, Australia.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:32
Last Modified: 29 Jun 2016 21:50
DOI: