Tolfree, D and O'Neill, W and Tunna, L and Sutcliffe, CJ (1999) Microfabrication of deep microstructures. In: MICRO/MEMS Symposium '99, -11-1999 to --, Gold Coast, Australia.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = other Proceedings published in Microelectronics Journal 31, 7 2000. ISSN: 0026-2692. Published by Elsvier Science |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div E > Production Processes |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:55 |
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| Last Modified: | 29 Oct 2012 01:03 |
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| DOI: | |
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