CUED Publications database

Characterisation of ionised magnetron sputtering plasmas for thin film deposition

Christou, C and Kusano, Y and Chiu, KF and Hutchings, IM and Barber, ZH (1999) Characterisation of ionised magnetron sputtering plasmas for thin film deposition. In: UNSPECIFIED pp. 35-36..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:11
Last Modified: 24 May 2016 23:44
DOI: