CUED Publications database

Characterisation of ionised magnetron sputtering plasmas for thin film deposition

Christou, C and Kusano, Y and Chiu, KF and Hutchings, IM and Barber, ZH (1999) Characterisation of ionised magnetron sputtering plasmas for thin film deposition. In: UNSPECIFIED pp. 35-36..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:56
Last Modified: 11 Aug 2014 01:10
DOI: