CUED Publications database

Characterisation of ionised magnetron sputtering plasmas for thin film deposition

Christou, C and Kusano, Y and Chiu, KF and Hutchings, IM and Barber, ZH (1999) Characterisation of ionised magnetron sputtering plasmas for thin film deposition. In: UNSPECIFIED pp. 35-36..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:54
Last Modified: 29 Jul 2015 02:28
DOI: