CUED Publications database

Characterisation of ionised magnetron sputtering plasmas for thin film deposition

Christou, C and Kusano, Y and Chiu, KF and Hutchings, IM and Barber, ZH (1999) Characterisation of ionised magnetron sputtering plasmas for thin film deposition. In: UNSPECIFIED pp. 35-36..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:46
Last Modified: 08 Feb 2016 09:10
DOI: