Christou, C and Kusano, Y and Chiu, KF and Hutchings, IM and Barber, ZH (1999) Characterisation of ionised magnetron sputtering plasmas for thin film deposition. In: International Conference on Phenomena in Ionized Gases, 11-7-1999 to 16-7-1999, Warsaw, Poland pp. 35-36..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
| Additional Information: | Event type = conference |
| Subjects: | UNSPECIFIED |
| Divisions: | Div E > Production Processes |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:23 |
| Last Modified: | 11 Mar 2013 02:03 |
| DOI: | |
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