Garner, DM and Ensell, G and Bonar, J and Blackburn, A and Udrea, F and Lim, HT and Popescu, A and Hemment, PLF and Milne, WI (1999) The fabrication of a partial SOI substrate. In: The 9th International Symposium on Silicon-on-Insulator Technology and Devices, 1999-5- to -- Chapter 54-..
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|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Additional Information: ||Event type = other Conference held in Seattle, WA, May 1999. Edited by Hemment, Peter L F. Conference item published as a book section.|
|Divisions: ||Div B > Electronics, Power & Energy Conversion|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:55|
|Last Modified: ||16 Nov 2011 19:00|
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