CUED Publications database

The fabrication of a partial SOI substrate

Garner, DM and Ensell, G and Bonar, J and Blackburn, A and Udrea, F and Lim, HT and Popescu, A and Hemment, PLF and Milne, WI (1999) The fabrication of a partial SOI substrate. In: The 9th International Symposium on Silicon-on-Insulator Technology and Devices, 1999-5- to -- Chapter 54-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:43
Last Modified: 25 Aug 2016 12:01
DOI: