CUED Publications database

The fabrication of a partial SOI substrate

Garner, DM and Ensell, G and Bonar, J and Blackburn, A and Udrea, F and Lim, HT and Popescu, A and Hemment, PLF and Milne, WI (1999) The fabrication of a partial SOI substrate. In: The 9th International Symposium on Silicon-on-Insulator Technology and Devices, 1999-5- to -- Chapter 54-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = other Conference held in Seattle, WA, May 1999. Edited by Hemment, Peter L F. Conference item published as a book section.
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:55
Last Modified: 16 Nov 2011 19:00
DOI:

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