CUED Publications database

Microsystems technology (MST) design

Klaubert, HL and Burgess, SC and Clarkson, PJ and Daniel, J and Kiriyama, T and Moore, DF and Shibaike, N and Upton, NK (1999) Microsystems technology (MST) design. Technical Report. Cambridge University Engineering Department, Cambridge, UK.

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Item Type: Monograph (Technical Report)
Uncontrolled Keywords: theme="Knowledge Management"
Divisions: Div C > Engineering Design
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:59
Last Modified: 19 Aug 2021 05:29