CUED Publications database

Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness

Whitmore, LC and Hutchings, IM and Puttick, KE and Gee, AE (1996) Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness. In: MRS Spring Meeting, 1996-4-8 to 1996-4-12, San Francisco, California, U.S.A..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 14:02
Last Modified: 07 Feb 2016 22:27
DOI: