Whitmore, LC and Hutchings, IM and Puttick, KE and Gee, AE (1996) Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness. In: MRS Spring Meeting, 8-4-1996 to 12-4-1996, San Francisco, California, U.S.A..
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|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Additional Information: ||Event type = conference MRS: Materials Research Society|
|Divisions: ||Div E > Production Processes|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:23|
|Last Modified: ||09 Jul 2012 01:02|
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