Whitmore, LC and Hutchings, IM and Puttick, KE and Gee, AE (1996) Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness. In: MRS Spring Meeting, 1996-4-8 to 1996-4-12, San Francisco, California, U.S.A..
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|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Divisions: ||Div E > Production Processes|
|Depositing User: ||Cron Job|
|Date Deposited: ||07 Mar 2014 12:33|
|Last Modified: ||10 Mar 2014 17:38|
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