Whitmore, LC and Hutchings, IM and Puttick, KE and Gee, AE (1996) Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness. In: MRS Spring Meeting, 8-4-1996 to 12-4-1996, San Francisco, California, U.S.A..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = conference MRS: Materials Research Society |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div E > Production Processes |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:23 |
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| Last Modified: | 09 Jul 2012 01:02 |
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| DOI: | |
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