CUED Publications database

Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness

Whitmore, LC and Hutchings, IM and Puttick, KE and Gee, AE (1996) Amorphous silicon produced in ultra-fine machining of wafers: microstructure and hardness. In: MRS Spring Meeting, 1996-4-8 to 1996-4-12, San Francisco, California, U.S.A..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:33
Last Modified: 10 Mar 2014 17:38
DOI: