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Spatially resolved characterization of the Si/SiO2 system using conducting atomic force microscopy

Murrell, MP and Welland, ME and Wong, TMH (1993) Spatially resolved characterization of the Si/SiO2 system using conducting atomic force microscopy. In: The 25th International Conference on Solid State Devices and Materials (SSDM 1993), -8-1993 to -- pp. 92-94..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = conference Conference held in Chiba; Japan, August 1993. Conference item published as a book section.
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:51
Last Modified: 15 Nov 2011 10:20
DOI:

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