CUED Publications database

Cleaning procedures for UHV cluster-tool MOS fabrication

Sofield, CJ and Murrel, MP and Sugden, S and Heynes, M and Verhaverbecke, S and Welland, ME and Golen, B and Barnes, J (1992) Cleaning procedures for UHV cluster-tool MOS fabrication. In: The MRS Symposium B, 1992-- to --.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 14:14
Last Modified: 12 Feb 2016 22:09
DOI: