CUED Publications database

Cleaning procedures for UHV cluster-tool MOS fabrication

Sofield, CJ and Murrel, MP and Sugden, S and Heynes, M and Verhaverbecke, S and Welland, ME and Golen, B and Barnes, J (1992) Cleaning procedures for UHV cluster-tool MOS fabrication. In: The MRS Symposium B, 1992-- to --.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:56
Last Modified: 05 Feb 2015 02:20
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