Sofield, CJ and Murrel, MP and Sugden, S and Heynes, M and Verhaverbecke, S and Welland, ME and Golen, B and Barnes, J (1992) Cleaning procedures for UHV cluster-tool MOS fabrication. In: The MRS Symposium B, --1992 to --.
Full text not available from this repository.
|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Additional Information: ||Event type = other Conference held in Spring 1992, San Francisco, USA. Conference item published as a book section.|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:51|
|Last Modified: ||15 Nov 2011 10:20|
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