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Comparison of low temperature methods for the production of silicon dioxide thin films

Baker, SD and Milne, WI and Taylor, S (1987) Comparison of low temperature methods for the production of silicon dioxide thin films. In: The MRS Fall Symposium on SiO2 and its Interfaces, 1987-11- to -- p.109-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:54
Last Modified: 06 Oct 2014 01:23
DOI:

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