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Comparison of low temperature methods for the production of silicon dioxide thin films

Baker, SD and Milne, WI and Taylor, S (1987) Comparison of low temperature methods for the production of silicon dioxide thin films. In: The MRS Fall Symposium on SiO2 and its Interfaces, -11-1987 to -- p.109-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = other Conference held in Boston, MA, November 1987. Edited by S.T. Pantelides, G. Lucovsky. Series ISSN: 0272-9172. Conference item published as a book section.
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:50
Last Modified: 15 Nov 2011 10:20
DOI:

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