CUED Publications database

Low temperature annealing of deposited SiO2 films

Baker, SD and Milne, WI and Clay, KJ and Taylor, S and Clough, FJ (1987) Low temperature annealing of deposited SiO2 films. In: The 15th MRS Symposium on Photon, Beam and Plasma Enhanced Processing, 1987-6- to -- p.407-..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:15
Last Modified: 05 Feb 2015 01:35
DOI: