CUED Publications database

Low temperature annealing of deposited SiO2 films

Baker, SD and Milne, WI and Clay, KJ and Taylor, S and Clough, FJ (1987) Low temperature annealing of deposited SiO2 films. In: The 15th MRS Symposium on Photon, Beam and Plasma Enhanced Processing, 1987-6- to -- p.407-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:14
Last Modified: 02 May 2016 06:14
DOI: