Baker, SD and Milne, WI and Clay, KJ and Taylor, S and Clough, FJ (1987) Low temperature annealing of deposited SiO2 films. In: The 15th MRS Symposium on Photon, Beam and Plasma Enhanced Processing, -6-1987 to -- p.407-..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = other Conference held in Strasbourg, France, June 1987. Edited by Golanski, A. et al. E-MRS: European Materials Research Society. Conference item published as a book section. |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:50 |
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| Last Modified: | 15 Nov 2011 10:20 |
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| DOI: | |
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