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Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp

Robertson, PA and Milne, WI (1986) Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp. In: The MRS Fall Meeting, -- to --.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:13
Last Modified: 04 Aug 2015 21:50
DOI: