CUED Publications database

Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp

Robertson, PA and Milne, WI (1986) Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp. In: The MRS Fall Meeting, -- to --.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event type = other Conference item published as a book section.
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:38
Last Modified: 15 Nov 2011 10:20
DOI:

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