CUED Publications database

Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp

Robertson, PA and Milne, WI (1986) Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp. In: The MRS Fall Meeting, -- to --.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Photonics
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:13
Last Modified: 28 May 2016 22:53
DOI: