CUED Publications database

Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp

Robertson, PA and Milne, WI (1986) Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp. In: The MRS Fall Meeting, -- to --.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:13
Last Modified: 04 Sep 2015 02:34
DOI: