CUED Publications database

Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp

Robertson, PA and Milne, WI (1986) Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp. In: The MRS Fall Meeting, -- to --.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:15
Last Modified: 05 Feb 2015 08:12
DOI: