CUED Publications database

Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures

Eagle, DJ and Milne, WI and Barden, PE (1986) Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures. In: The MRS European Conference, -- to -- p.71-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 18:50
Last Modified: 21 Feb 2017 23:47
DOI: