CUED Publications database

Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures

Eagle, DJ and Milne, WI and Barden, PE (1986) Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures. In: The MRS European Conference, -- to -- p.71-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:47
Last Modified: 13 Feb 2016 00:30
DOI: