CUED Publications database

Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures

Eagle, DJ and Milne, WI and Barden, PE (1986) Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures. In: The MRS European Conference, -- to -- p.71-..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:08
Last Modified: 26 Mar 2015 01:44
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