Eagle, DJ and Milne, WI and Barden, PE (1986) Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures. In: The MRS European Conference, -- to -- p.71-..
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|Item Type: ||Conference or Workshop Item (UNSPECIFIED)|
|Additional Information: ||Event type = conference Conference item published as a book section.|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:50|
|Last Modified: ||15 Nov 2011 10:20|
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