Eagle, DJ and Milne, WI and Barden, PE (1986) Comparison between low temperature oxide produced from NO2/SiH4 and N2O/SiH4 mixtures. In: The MRS European Conference, -- to -- p.71-..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Additional Information: | Event type = conference Conference item published as a book section. |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:50 |
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| Last Modified: | 15 Nov 2011 10:20 |
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| DOI: | |
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