CUED Publications database

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

Lee, JEY and Yan, J and Seshia, AA (2009) Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator. Journal of Micromechanics and Microengineering, 19. 074003-. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:20
Last Modified: 10 Mar 2014 18:06
DOI: 10.1088/0960-1317/19/7/074003