CUED Publications database

Deep reactive ion etching as a tool for nanostructure fabrication

Fu, YQ and Colli, A and Fasoli, A and Luo, JK and Flewitt, AJ and Ferrari, AC and Milne, WI (2009) Deep reactive ion etching as a tool for nanostructure fabrication. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 27. pp. 1520-1526. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:55
Last Modified: 24 May 2016 23:30
DOI: 10.1116/1.3065991