CUED Publications database

Deep reactive ion etching as a tool for nanostructure fabrication

Fu, YQ and Colli, A and Fasoli, A and Luo, JK and Flewitt, AJ and Ferrari, AC and Milne, WI (2009) Deep reactive ion etching as a tool for nanostructure fabrication. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 27. pp. 1520-1526. ISSN 1071-1023

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:15
Last Modified: 05 Feb 2015 01:35
DOI: 10.1116/1.3065991