CUED Publications database

High-quality micromachining of silicon at 1064 nm using a high-brightness MOPA-based 20-W Yb fiber laser

O'Neill, W and Li, K (2009) High-quality micromachining of silicon at 1064 nm using a high-brightness MOPA-based 20-W Yb fiber laser. IEEE Journal of Selected Topics in Quantum Electronics, 15. pp. 462-470. ISSN 1077-260X

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Div B > Photonics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:22
Last Modified: 24 Nov 2014 01:03
DOI: 10.1109/JSTQE.2009.2012269