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Parasitic feedthrough cancellation techniques for enhanced electrical characterisation of electrostatic microresonators

Lee, JE-Y and Seshia, AA (2009) Parasitic feedthrough cancellation techniques for enhanced electrical characterisation of electrostatic microresonators. Sensors and Actuators A: Physical. ISSN 0924-4247

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 17:34
Last Modified: 21 Feb 2017 22:56
DOI: