CUED Publications database

Bulk acoustic mode single crystal silicon resonator with high quality factor

Lee, JEY and Zhu, Y and Seshia, AA (2008) Bulk acoustic mode single crystal silicon resonator with high quality factor. Journal of Micromechanics and Microengineering, 18. 064001-. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 14:03
Last Modified: 01 May 2016 02:09
DOI: 10.1088/0960-1317/18/6/064001