CUED Publications database

Bulk acoustic mode single crystal silicon resonator with high quality factor

Lee, JE-Y and Zhu, Y and Seshia, AA (2008) Bulk acoustic mode single crystal silicon resonator with high quality factor. Journal of Micromechanics and Microengineering, 18. 064001-. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:32
Last Modified: 08 Dec 2016 07:51
DOI: