CUED Publications database

Bulk acoustic mode single crystal silicon resonator with high quality factor

Lee, JEY and Zhu, Y and Seshia, AA (2008) Bulk acoustic mode single crystal silicon resonator with high quality factor. Journal of Micromechanics and Microengineering, 18. 064001-. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 14:41
Last Modified: 26 Jul 2015 00:06
DOI: 10.1088/0960-1317/18/6/064001