CUED Publications database

Diamond and diamond-like carbon MEMS

J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:04
Last Modified: 26 Mar 2015 19:04
DOI: 10.1088/0960-1317/17/7/S12