J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:48 |
| Last Modified: | 16 May 2013 19:24 |
| DOI: | 10.1088/0960-1317/17/7/S12 |
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