J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317Full text not available from this repository.
|Divisions:||Div C > Materials Engineering|
|Depositing User:||Cron job|
|Date Deposited:||04 Feb 2015 22:04|
|Last Modified:||11 May 2015 01:18|