J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
Div C > Materials Engineering
|Depositing User:||Cron Job|
|Date Deposited:||18 May 2016 17:48|
|Last Modified:||24 Aug 2016 03:02|