CUED Publications database

Diamond and diamond-like carbon MEMS

J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:17
Last Modified: 25 Sep 2016 02:42
DOI: