J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317Full text not available from this repository.
|Divisions:||Div C > Materials Engineering|
|Depositing User:||Cron Job|
|Date Deposited:||28 Oct 2011 16:48|
|Last Modified:||16 May 2013 19:24|
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