J K, L and Y Q, F and H R, L and J A, W and S M, S and W I, M (2007) Diamond and diamond-like carbon MEMS. Journal of Micromechanics and Microengineering, 17. S147-S163. ISSN 0960-1317Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
Div C > Materials Engineering
|Depositing User:||Unnamed user with email email@example.com|
|Date Deposited:||18 May 2016 17:48|
|Last Modified:||30 Jul 2016 23:17|