CUED Publications database

Stress and crystallization of plasma enhanced chemical vapour deposition nanocrystalline silicon films

Milne, SB and Fu, YQ and Luo, JK and Flewitt, AJ and Pisana, S and Fasoli, A and Milne, WI (2007) Stress and crystallization of plasma enhanced chemical vapour deposition nanocrystalline silicon films. Journal of Nanoscience and Nanotechnology, 8. pp. 2693-2698. ISSN 1533-4880

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:47
Last Modified: 15 May 2013 19:08
DOI:

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