CUED Publications database

Stress and crystallization of plasma enhanced chemical vapour deposition nanocrystalline silicon films

Milne, SB and Fu, YQ and Luo, JK and Flewitt, AJ and Pisana, S and Fasoli, A and Milne, WI (2007) Stress and crystallization of plasma enhanced chemical vapour deposition nanocrystalline silicon films. Journal of Nanoscience and Nanotechnology, 8. pp. 2693-2698. ISSN 1533-4880

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:15
Last Modified: 31 Aug 2015 07:58
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